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Pvd Coating Colours For Each Target Material

Views: 34     Author: Site Editor     Publish Time: 2022-07-29      Origin: Site

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PVD coating method with adjustable target layer colour


1. plating metal film layer, the product to be coated into the coating chamber equipped with metal targets, open the pump vacuum and heating device for substrate heating, so that the vacuum of the substrate to 1 × 10-3Pa and reach 80-150 ℃ process temperature, the chamber into the 10-1000sccm argon gas, start sputtering power, set the sputtering power 1-15KW, coating time 10-300S, to obtain a metal film layer of thickness 1-100nm, metal film layer of copper (Cu), silver (Ag), aluminum (Al), aluminum (Al), metal film layer of color adjustable. A metal film layer with a thickness of 1-100nm is obtained, the metal film layer is copper (Cu), silver (Ag), aluminium (Al), chromium (Cr) and other metal layers, or nickel-copper (NiCu), nickel-chromium (NiCr) and other alloy layers.


2. Plating low refractive index film layer, pass the product after plating the metal film layer into the target coating chamber equipped with a low refractive index film layer that can be formed, heat it up to a process temperature of 80-150°C, pass process gas into the chamber, set the sputtering power 1-15 KW, coating time 1-300S, and obtain a low refractive index film layer with a thickness of 1-100 nm, this low refractive index film layer is silicon oxide, silicon nitride and other film layers.


3. Plating a high refractive index film layer, passing the product after plating a low refractive index film layer into a target coating chamber equipped with a target that can form a high refractive index film layer, heating to a process temperature of 80-150°C, passing a process gas into the chamber, setting sputtering power 1-15 KW, coating time 1-300S, obtaining a high refractive index film layer of thickness 1-100 nm, said high refractive index film layer being titanium oxide, titanium nitride, zirconium oxide, zirconium nitride, niobium oxide, niobium nitride, zinc oxide, indium oxide, aluminium oxide, iron oxide, chromium oxide, chromium nitride and other film layers, the process gas for this high and low refractive index film layer being at least one of Ar, N2 and O2, wherein the Ar gas flow rate is 10-1000 sccm, the N2 gas flow rate is 10-1000 sccm and the O2 gas flow rate is 10-1000 sccm.


4. Repeat steps two and three several times to obtain different coloured film layers, repeating steps two and three from 1 to 100 times.


The following materials are commonly used in vacuum coated decorative films and the various types of decorative colour coatings produced by their common gases


  • Zirconium target + nitrogen: yellow-green with golden tones

  • Zirconium target + methane: dark and light black

  • Zirconium target + oxygen: white, transparent film

  • Zirconium target + nitrogen + methane: gold, imitation rose gold

  • Chromium target + methane: dark and light black

  • Chrome target + nitrogen: light black

  • Chromium target + nitrogen + methane: silver grey

  • Chromium target + oxygen: light yellow, purple, green

  • Stainless steel target + oxygen: purple

  • Stainless steel target + nitrogen: blue

  • Stainless steel target + methane: bright black

  • Silicon target + nitrogen: black

  • Silicon target + oxygen: cloudy white, transparent film

  • Silicon target + methane: yellow, green, blue, black (target purity higher than 99% can only be adjusted to black)


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